CRDS Trace Moisture Sensor with Innovative Spectral Analysis Technology Achieving Unprecedented Miniaturization

mini CRDS Sensor (H₂O)
OEM Unit

The mini CRDS sensor is designed for trace moisture measurement and is based on Cavity Ring-Down Spectroscopy technology. With its proprietary optical design and spectral analysis technology, it achieves unprecedented miniaturization.

It enables highly sensitive, highly accurate, and high-speed measurement of trace moisture (12 ppbv to 20 ppmv, -100 to -55°C DP) in high-purity gases such as carrier gases and atmospheric gases.

Inquiries are welcomed regarding its application as an OEM unit for integration into semiconductor manufacturing equipment, glove boxes, and other systems.

For more information, please contact us.

※mini CRDS sensor has been developed with cooperation of the National Institute of Advanced Industrial and Technology (AIST).

Contact

Key Applications

  • Glove boxes
  • Dry rooms, dry chambers
  • High-purity gas production lines
  • Semiconductor manufacturing equipment (etching, exposure, thin film formation, coating processes, etc.)
  • Solid-state battery manufacturing equipment
  • Solid-state battery material production lines
  • Ammonia, hydrogen filling facilities
  • Freeze dryers
  • Aerospace-related equipment, and more

* This OEM unit is supplied exclusively to manufacturers of equipment or facilities like those mentioned above.
　For further details, please contact us.　

Specifications (Example)

Measurement MethodCRDS (Cavity Ring Down Spectroscopy)
Measurement Range12 ppbv to 20 ppmv (-100 to -55 ℃ DP)
Accuracy±4% or ±12 ppbv
Response SpeedApprox. 60 s (90% response for 50 ⇔ 1000 ppbv change)
Operating ConditionsTemp.: 10 to 40 ℃
Humidity: 35 to 80% RH (non-condensing)
Sample GasType: Air, N₂, O₂, Ar, etc.
Other gases are supported. Contact us for more information and assistance.
Temp.: 5 to 60 ℃
Flow Rate: < 2.0 L/min
Pressure: 86 to 106 kPaA (Options for < 900 kPaA available)

Technical Documents

Contact